Hlangana ne-Forksheet: I-Imec’s In-Between Transistor

Abakhiqizi abathuthuke kakhulu babaphrosesa bamakhompiyutha baphakathi noshintsho olukhulu lokuqala ekwakhiweni kwedivayisi eminyakeni eyishumi—ukushintsha ukusuka ama-finFETs ku ama-nanosheets. Eminye iminyaka eyishumi kufanele ilethe olunye ushintsho oluyisisekelo, lapho amadivaysi e-nanosheet anqwabelene phezulu ukuze akheke ama-FET ahambisanayo (ama-CFET), ekwazi ukusika usayizi weminye imibuthano phakathi. Kodwa lesi sinyathelo sakamuva kungenzeka ukuthi sithwale kanzima, kusho ochwepheshe. Ophakathi i-transistor ebizwa ngokuthi imfoloko ingase igcine izifunda zincipha ngaphandle komsebenzi omningi.

Umqondo we-forksheet uqhamuke ekuhloleni imikhawulo ye-nanosheet architecture, kusho. UJulien Ryckaertiphini likamongameli we-logic technologies at Imec. Isici esiyinhloko se-nanosheet izitaki zayo ezivundlile zamaribhoni e-silicon azungezwe isango elilawulayo lamanje. Nakuba ama-nanosheets asanda kufakwa ekukhiqizeni, ochwepheshe base bevele befuna imingcele yabo eminyakeni edlule. I-Imec inikezwe umsebenzi wokuthola ukuthi “isikhathi esingakanani i-nanosheet izoqala ukusebenza,” usho kanje.

Ithimba lika-Ryckaert lithole ukuthi omunye wemikhawulo eyinhloko ekuncipheni komqondo okusekelwe ku-nanosheet ukugcina ukuhlukana phakathi kwezinhlobo ezimbili ze-transistor ezakha ingqondo ye-CMOS. Lezi zinhlobo ezimbili—i-NMOS ne-PMOS—kufanele zigcine ibanga elithile ukuze kukhawulwe amandla anciphisa ukusebenza kwamadivayisi nokusetshenziswa kwamandla. “I-forksheet iyindlela yokweqa lowo mkhawulo,” kusho uRyckaert.

Esikhundleni semishini ye-nanosheet ngayinye, uhlelo lwe-forksheet luyakha njengamapheya nhlangothi zombili zodonga lwe-dielectric. (Cha, empeleni akufani nemfoloko kakhulu.) Udonga luvumela amadivayisi ukuthi abekwe eduze ngaphandle kokubangela inkinga ye-capacitance, kusho. Naoto Horiguchi, umqondisi wobuchwepheshe be-CMOS kwa-Imec. Abaklami bangasebenzisa isikhala esengeziwe ukunciphisa amaseli anengqondo, noma bangasebenzisa igumbi elengeziwe ukuze bakhe ama-transistors anamashidi abanzi aholela ekusebenzeni okungcono, uthi.

Ama-transistors asemaphethelweni aphambili asevele eshintsha ukusuka ku-fin field-effect transistor (FinFET) ukuya kuma-nanosheet. Umgomo omkhulu uwukunqwabelanisa amadivayisi amabili phezulu kwelinye ekucushweni kwe-CFET. I-forksheet ingaba yisinyathelo somlamuli endleleni.Imec

“I-CFET cishe iyisakhiwo sokugcina se-CMOS,” kusho u-Horiguchi wedivayisi i-Imec elindele ukuthi ifinyelele ukulungela ukukhiqizwa cishe ngo-2032. Kodwa wengeza ngokuthi i-CFET “ukuhlanganiswa kuyinkimbinkimbi kakhulu.” I-Forksheet isebenzisa kabusha izinyathelo eziningi zokukhiqiza i-nanosheet, okungenzeka ikwenze kube umsebenzi olula, uthi. I-Imec ibikezela ukuthi ingalunga ngo-2028.

Kusenezithiyo eziningi okufanele ugxume ngazo, nokho. “Kunzima kakhulu kunalokho obekucatshangwa ekuqaleni,” kusho uHoriguchi. Ngokombono wokukhiqiza, udonga lwe-dielectric luyikhanda elincane. Kunezinhlobo ezimbalwa ze-dielectric ezisetshenziswa ku-CMOS ethuthukisiwe kanye nezinyathelo ezimbalwa ezibandakanya ukuyisusa. Ukwenza ama-forksheets kusho ukufaka amanye ngaphandle kokuhlasela udonga ngephutha. Futhi kusengumbuzo ovulekile ukuthi yiziphi izinhlobo ze-transistor okufanele zihambe nhlangothi zombili zodonga, kusho uHoriguchi. Umbono wokuqala bekuwukubeka i-PMOS kolunye uhlangothi kanye ne-NMOS kolunye, kodwa kungase kube nezinzuzo zokubeka uhlobo olufanayo nhlangothi zombili esikhundleni salokho.